MAE 5165 - Micro Electro Mechanical Systems (MEMS)

3 Credits

Integration of electrical and mechanical processes to design micromachines. Properties of materials. Structural design: fundamental mechanics, systems, and vibrations. Transducer and actuator principles. Sensor design integration and applications.Prerequisites: MATH 313, MATH 340, MAE 4402 or MAE 5493, ECE 2220 or equivalent.