2010-2011 Catalog 
    
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2010-2011 Catalog [ARCHIVED CATALOG]

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MAE 5167 - Mems Design and Fabrication Laboratory

3 Credits (Minimum) 3 Credits (Maximum)
Integration of electrical and mechanical design processes to build micro machines. Process design: wet chemical etching, wafer bonding, RIE and CMP. Surface micro machining. Sensor design integration and application. Prer., MAE 5165.


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