ECE 4080 - VLSI Processing

3 Credits (Minimum) 3 Credits (Maximum)

Introductory study of the various processes such as oxidation, diffusion, epitaxy, ion-implantation, photolithography, CVD, plasma processing, etc., used in contemporary fabrication of modern microelectronic technologies; use and understanding of process modeling programs used in design, fabrication, and simulation of MOSFET and bipolar microelectronics technologies. Prer., ECE 3020. College of Engineering students only. Meets with ECE 5080.