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Dec 30, 2024
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ECE 5080 - VLSI Processing3 Credits
Introductory study of the various processes such as oxidation, diffusion, epitaxy, ion-implantation, photolithography, CVD, plasma processing, etc used in contemporary fabrication of modern microelectronic technologies; use and understanding of process modeling programs used in fabrication simulation of MOSFET and bipolar microelectronic technologies.Prerequisites: ECE 3020 or consent of instructor.
Meets with ECE 4080.
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