ECE 5060 - Processing and Device Physics of Advanced MOSFET Microelectronic Structures

3 Credits

Development of basic and up-to-date understanding of the fabrication, processing, and device physics of advanced MOSFET structures used in contemporary microelectronic circuits. Topics covered include MOS theory and characterization, MOSFET process/device physics, advanced MOSFET process/device topics, review and study of current literature.Prerequisites: ECE 4020/5020 or consent of instructor.