ECE 4040 - Introductory VLSI Fabrication Laboratory

1 Credits

Various types of VLSI fabrication processes such as thermal oxidation, rapid thermal annealing, diffusion, physical vapor deposition, ion implantation, photolithography and etching. In addition, students will use a variety of device characterization techniques available in the laboratory.Prerequisites: ECE 4020 and ECE 4080 or consent of instructor.