|
|
Dec 14, 2024
|
|
ECE 5080 - VLSI Processing3 Credits (Minimum) 3 Credits (Maximum)
Introductory study of the various processes such as oxidation, diffusion, epitaxy, ion-implantation, photolithography, CVD, plasma processing, etc., used in contemporary fabrication of modern microelectronic technologies; use and understanding of process modeling programs used in fabrication simulation of MOSFET and bipolar microelectronic technologies. Prer., ECE 3020 or consent of instructor. Meets with ECE 4080.
Add to Portfolio (opens a new window)
|
|
|