ECE 5060 - Processing and Device Physics of Advanced MOSFET Microelectronic Structures

3 Credits (Minimum) 3 Credits (Maximum)

Development of basic and up-to-date understanding of the fabrication, processing, and device physics of advanced Mosfet structures used in contemporary microelectronic circuits. Topics covered include MOS theory and characterization, MOSFET process/ device physics, advanced MOSFET process/device topics, review and study of current literature. Prer., ECE 4020/5020 or consent of instructor.