ECE 5080 - VLSI Processing

3 Credits (Minimum) 3 Credits (Maximum)

Introductory study of the various processes such as oxidation, diffusion, epitaxy, ion-implantation, photolithography, CVD, plasma processing, etc., used in contemporary fabrication of modern microelectronic technologies; use and understanding of process modeling programs used in fabrication simulation of MOSFET and bipolar microelectronic technologies. Prer., ECE 3020 or consent of instructor. Meets with ECE 4080.