|
|
|
Apr 23, 2024
|
|
ECE 5080 - VLSI Processing3 Credits
Introductory study of the various processes such as oxidation, diffusion, epitaxy, ion-implantation, photolithography, CVD, plasma processing, etc., used in contemporary fabrication of modern microelectronic technologies; use and understanding of process modeling programs used in fabrication simulation of MOSFET and bipolar microelectronic technologies.Prerequisites: ECE 3020 or consent of instructor
Meets with ECE 4080
Add to Portfolio (opens a new window)
|
|
|
