2009-2010 Catalog 
    
    Apr 25, 2024  
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2009-2010 Catalog [ARCHIVED CATALOG]

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ECE 4040 - Introductory VLSI Fabrication Laboratory

1 Credits
Various types of VLSI fabrication processes such as thermal oxidation, rapid thermal annealing, diffusion, physical vapor deposition, ion implantation, photolithography and etching. In addition, students will use a variety of device characterization techniques available in the laboratory.Prerequisites: ECE 4020 and ECE 4080 or consent of instructor


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